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CORR
2008
Springer
52views Education» more  CORR 2008»
15 years 7 months ago
0-level Vacuum Packaging RT Process for MEMS Resonators
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is co...
Nicolas Abelé, D. Grogg, C. Hibert, F. Cass...
CORR
2008
Springer
88views Education» more  CORR 2008»
15 years 7 months ago
Online Sensor Testing through Superposition of Encoded Stimulus
Online monitoring remains an important requirement for a range of microsystems. The solution based on the injection of an actuating test stimulus into the bias structure of active...
Norbert Dumas, Zhou Xu, Kostas Georgopoulos, R. Jo...
CORR
2008
Springer
98views Education» more  CORR 2008»
15 years 7 months ago
Modeling of T-Shaped Microcantilever Resonators
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of th...
Margarita Narducci, Eduard Figueras, Isabel Gracia...
CORR
2008
Springer
76views Education» more  CORR 2008»
15 years 7 months ago
Design and Fabrication of the Suspended High-Q Spiral Inductors with X-Beams
In this paper, deep sub-micron CMOS process compatible high Q on chip spiral inductors with air gap structure were designed and fabricated. In the design the electromagnetic solve...
M. C. Hsieh, D. K. Jair, Y. K. Fang, C. S. Lin
CORR
2008
Springer
143views Education» more  CORR 2008»
15 years 7 months ago
Joint Source Channel Coding with Side Information Using Hybrid Digital Analog Codes
We study the joint source channel coding problem of transmitting an analog source over a Gaussian channel in two cases - (i) the presence of interference known only to the transmit...
Makesh Pravin Wilson, Krishna R. Narayanan, Giusep...